Upphandling

Electron Beam Lithography (EBL) Tool

TED-nummer

690718-2026

Status

Pågående

Upphandlande myndighet

Lunds universitet

Sista anbudsdag

5 november 2026

Uppskattat värde

26 000 000 SEK

CPV-huvudkod

38000000 – Laboratorieutrustning, optisk utrustning och precisionsutrustning (exkl. glas)

Region

Skåne län

Publicerad

7 oktober 2026

Källa

Annons i TED

Lunds universitet upphandlar Electron Beam Lithography (EBL) Tool. Sista anbudsdag är 5 november 2026.

Om upphandlingen

Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.

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Relaterat

• Alla upphandlingar från Lunds universitet
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Uppgifter: TED, Upphandlingsmyndigheten och nationella annonsdatabaser | Bearbetning: Tilldelat (tilldelat.se) | Publicerad i TED 7 oktober 2026 | Originalannons